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High Vacuum System - $25,000
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Fully Rebuilt Darly DMC 800
Vacuum and Pumping Systems:
High Vacuum Pump: Existing Varian VHS 10 Diffusion Pump disassembled, cleaned, and
reassembled with new oil, heater, and cooling circuit. All components are leak-tested and meet
factory specifications.
Cooling Baffle:
Inspected and tested for leaks to ensure optimal performance.
Valves:
Soft and Hard roughing valves replaced with a single Nor-Cal Genesis 2 stage valve.
Foreline valve to the Diffusion Pump replaced with a new Nor-Cal Genesis valve.
VAT High Vacuum Gate Valve disassembled, inspected, and refurbished with new seals, o-rings,
and plate seal, then leak-tested.
Gauges:
Retained existing Telvac Gauge controller.
New Thermocouple and Cold Cathode Ion gauges installed.
Performance/Safety:
Achieves a minimum of 8E-7 Torr within 60 minutes after re-build.
All vacuum seals and o-rings replaced.
Standard interlocks provided.
E-stop buttons added to the front and back.
Electrical cabinet equipped with a master disconnect switch.
Process Gas:
0-50 SCCM Mass Flow Controller calibrated to N2 for process gas bled into the chamber.
Substrate Rotation and Heating:
Existing drive system for substrate rotation, with bearing replacement.
Dual quartz heaters for substrate heating, with fixed position indicators for reassembly.
Water Cooling:
¾” minimum manifold for water cooling, with air purge line regulated to 15 psi.
Adjustable flow control valves for E-Beam sources, internal cooling shields, and main system.
System Controls:
Pumping sequence with Service, Manual, and Auto modes.
Soft-rough for 200 seconds, crossover to high vacuum at 135 microns.
Vent control integrated with deposition program.
Plumbing:
Reused existing water supply/return manifold.
Exterior plumbing with SS or copper tubes, Swagelok fittings.
Internal water lines with Swagelok ⅜ tube to ½ VCO SS Braided lines.
Electrical:
System designed for 208V 3 phase power.
Neutral bar added, multi-strip or 6-110 outlets installed.
Circuit breakers replace fuse blocks where possible.
Electrical system meets current IEEC Federal, State, and local codes.
Automation Direct Dl-205 PLC and a 15” HMI touchscreen panel installed.
Pneumatic:
New main supply regulator with at least ⅜” connections and 150 psi capability.
Existing regulators, solenoid valves, and other pneumatic devices inspected, rebuilt, or replaced
as necessary.
Condition
The System has been fully refurbished by Yeagle Technology in 2020 and never put into
service and is therefore in “like new” condition.